In order Ivacaftor CFTR to select one detection resonance only, a PbSrTe buffer layer is included. Due to its alloying the cut-off is shifted towards shorter wavelengths which http://www.selleckchem.com/products/Imatinib-Mesylate.html are absorbed, while being transparent for the design wavelengths. The tunable range is therefore confined by the cut-off wavelength of the buffer and the cut-off of the photodiode [5].The upper part contains the movable MEMS structure. It is fabricated in the highly doped device Inhibitors,Modulators,Libraries layer of an SOI wafer and bonded anodically to a glass wafer, where the actuation counter electrodes are placed. A reflective gold coating evaporated on the suspended silicon membrane serves as mirror. The detector including mirrors, electrostatic actuation and the optical cavity has a thickness of only about 30 ��m.
The width of the resonance peaks is determined by the reflectance of the mirrors and the absorption Inhibitors,Modulators,Libraries within the cavity (the finesse of the cavity), as well as the order of the resonance [1]. The detector order configuration is chosen by the initial distance Inhibitors,Modulators,Libraries of the movable mirror, additionally limited Inhibitors,Modulators,Libraries by the material within the cavity. In Figure 2 the simulation of the response of a RCED with a similar setup as presented below for the detector employing the comb drive actuated micromirror (R1 ~ 90%, R2 = 99%, reduced absorber thickness) is shown. With this configuration, a single detection peak can be obtained and the detection wavelength can be shifted from 4.6 Inhibitors,Modulators,Libraries ��m to 5.5 ��m for a mirror movement range of 2 ��m.
Inhibitors,Modulators,Libraries With the simulation the strength of the tunable RCED principle becomes apparent; the cavity effect allows both field enhancement and at the same time to shift the detected wavelengths.
Figure Inhibitors,Modulators,Libraries GSK-3 Inhibitors,Modulators,Libraries 2.Detector quantum efficiency simulated for perpendicular incident radiation at 100 K using the transfer matrix method. Displacing the movable MEMS mirror allows changing the air cavity length and thus the detection wavelength. At a certain mirror position, …2.?Movable MEMS MirrorsFor a displacement range of about 2 ��m of the movable micromirror different actuation methods can be applied. Realized detector systems are presented using piezoelectric actuation [2], electrostatic actuation in a parallel plate configuration [6] and electrostatic actuation in a comb drive configuration [4].
Enzalutamide MDV3100 Integration of the detector and the mirror is hereby possible in a much higher degree for the MEMS micromirrors than for the piezoelectrically actuated micromirrors.
2.1. Parallel Plate Electrostatic ActuationThe fabrication of a micromirror actuated by parallel plate electrostatic actuators is based on a process using Silicon on Insulator wafers (SOI, Device Layer 20 ��m/Buried Oxide Layer 4 ��m/Handle Layer 300 ��m) as shown in Figure 3. The highly doped device layer is structured in two Cilengitide steps by Deep Reactive Ion Etching http://www.selleckchem.com/products/chir-99021-ct99021-hcl.html (DRIE). The first etch step of ~10 ��m defines the electrostatic actuation gap. The second etch step defines the mirror and the suspension legs in the remaining device layer.